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TY - CONF AU - Ito, R. AU - Hayano, H. AU - Ito, H. AU - Iwashita, Y. AU - Katayama, R. AU - Kubo, T. AU - Nagata, T. AU - Oikawa, H. AU - Saeki, T. ED - Schaa, Volker RW ED - Pei, Guoxi ED - Chin, Yong Ho ED - Fu, Shinian ED - Zhao, Ning TI - Construction of Thin-film Coating System Toward the Realization of Superconducting Multilayered Structure J2 - Proc. of LINAC2018, Beijing, China, 16-21 September 2018 CY - Beijing, China T2 - Linear Accelerator Conference T3 - 29 LA - english AB - Although S-I-S (superconductor-insulator-superconductor) multilayered structure is expected to increase the maximum acceleration gradient of SRF cavities, in order for it to function in reality, it is necessary to develop a coating processing that can realize high purity and quality superconducting thin-films. We launched the co-sputtering system to create superconducting alloy thin-films such as Nb3Sn and to research how the characteristics of them change depending on the coating conditions. The deposition rate of two elements was optimized by adjusting each input power, so we successfully obtained an alloy thin-film having appropriate composition ratio. In addition, we developed another experimental equipment for coating on the inner surface of the 3GHz TESLA type small cavities. A cylindrical shape Nb in which some permanent magnets are inserted was adopted as the sputtering target. Glow discharge of the target was confirmed, and the inner-sputtering test was conducted. This presentation reports the specifications of the two sputtering apparatuses and the results of the coating test. PB - JACoW Publishing CP - Geneva, Switzerland SP - 445 EP - 447 KW - cathode KW - cavity KW - experiment KW - SRF KW - site DA - 2019/01 PY - 2019 SN - 2226-0366 SN - 978-3-95450-194-6 DO - DOI: 10.18429/JACoW-LINAC2018-TUPO050 UR - http://jacow.org/linac2018/papers/tupo050.pdf ER -